Polygon Physics specializes in ultracompact ultralow power ECR technology. This technology enables stable and reliable plasma, ion, or electron beams and yields us the unique capability to develop arrays of sources to create any beam of choice, linear or circular, small or large. We design and fabricate source modules for nuclear and atomic physics applications, and we design and fabricate source modules as well as complete systems for surface engineering applications such as ion beam sputter deposition, surface nanostructuring, ion beam figuring/finishing, surface sputtering/cleaning, ion beam mixing, ion beam assisted deposition, electron beam welding, and ion implantation.