We provide solutions for semiconductor frontend processes automation and metrology as well as PV frontend processes metrology. The solutions include Automation for wafer handling and Metrology for electrical process characterisations. For some years we now also provide non contact resistance measurement systems with proprietary functionality to direct correlate with other measurement methods. The instruments provide an excellent performance in long term stability and tool-to-tool matching. Additional measurement systems are availalbe for high throughput PV wafer applications and conductive film monitoring for display, thinfilm PV and other large area coating technologies.